About: http://webisa.webdatacommons.org/18595294

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	eactive ion etching operation of only the surface layer ... .(b) In contrast, ion implantation is a technique designed to place ion species into bulk material.
http://www.w3.org/ns/prov#wasQuotedFrom	epo.org