PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • conventional interconnections, with the lines and the metal contacts being produced by depositing a metal such as aluminium or tungsten, with the metal that has been deposited then being etched, which is why it is therefore incompatible with copper
http://www.w3.org/ns/prov#wasQuotedFrom
  • patents.com