About: http://webisa.webdatacommons.org/186139823

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	According to one embodiment, the coating is a material selected from the group comprising: a nitride, an oxide, and an oxy-nitride of silicon, and amorphous silicon.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com