About: http://webisa.webdatacommons.org/186157182

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Accordingly, there is a need for an improved etch selectivity, with an improved process window, which has the ability to operate under a wide range of aspect ratios.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com