About: http://webisa.webdatacommons.org/18686972

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Referring to FIG. 1, a semiconductor wafer such as a silicon wafer is transported along a transportation path 10a, and is then placed on an entrance stage 10b.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com