| http://www.w3.org/ns/prov#value | - Ions, such as hydrogen ions, are then implanted through the top surface to form the low conductivity zone that surrounds the core zone of each VCSEL. For example, the mask defines the core zone 115 of the VCSEL 101, and ions are implanted to form the low conductivity zone 113 surrounding the core zone of the VCSEL 101.
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