About: http://webisa.webdatacommons.org/187733376

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A workpiece such as a semiconductor wafer or layer comprising silicon or gallium arsenide is supported for movement on conventional X-Y-Z axes.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com