About: http://webisa.webdatacommons.org/187794531

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Also, a space pattern is a portion of the resist film exposed to the exposing light, that is, an opening where the resist film is removed through the development (namely, a resist removal pattern).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com