About: http://webisa.webdatacommons.org/187864601

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	layer by the sputtering method is especially useful in the case of forming the thin film by the sputtering method.
http://www.w3.org/ns/prov#wasQuotedFrom	docstoc.com