About: http://webisa.webdatacommons.org/187871079

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Cluster tools include chambers grouped together so that multiple deposition, etching, or other processes can be performed sequentially without exposing substrates to room air between the processes.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com