About: http://webisa.webdatacommons.org/18821251

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Electrode material, such as TiN, TaN, W, Al, Cu, TiSiN, TaSiN, or other suitable electrode material, is deposited over preprocessed wafer 140 a to provide first electrode material layer 124 a.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com