About: http://webisa.webdatacommons.org/188360429

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	However, in order to attain for example the 70 nm technology generation, a transition must be realized in light wavelengths used in the exposure apparatuses, to those apparatuses where ??=157 nm.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com