About: http://webisa.webdatacommons.org/188475451

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	However, there is a trade off for improving the thermal stability of a word line using a thin nitride layer 252.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es