About: http://webisa.webdatacommons.org/188490616

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	onal speed at which wafer 110 spins, and/or various other processes related to processing of and/or forming devices in or on wafer 110, including processes described below with respect to FIG. 4.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com