About: http://webisa.webdatacommons.org/188657822

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Moreover, some implementations of an in-plane MEMS varactor may be co-fabricated with passive components such as resistors and high quality factor (Q) capacitors and inductors.
http://www.w3.org/ns/prov#wasQuotedFrom	freshpatents.com