About: http://webisa.webdatacommons.org/189186282

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Pretreatment process 20 includes an annealing step 22 in which a substrate, such as a semiconductor substrate or a glass substrate, is annealed in a thermal anneal chamber and/or is annealed in a plasma anneal chamber.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com