About: http://webisa.webdatacommons.org/189202279

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Prior art carrier assemblies designed for compatibility with circular wafers employ round retaining structures such as retaining rings.
http://www.w3.org/ns/prov#wasQuotedFrom	google.de