About: http://webisa.webdatacommons.org/189363385

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Silicon halides such as silicon tetrachloride, SiCl4, may be used to increase the silicon content, but they may leave chloride as an impurity in the product, and their reactions may be slower than desired.
http://www.w3.org/ns/prov#wasQuotedFrom	google.de