About: http://webisa.webdatacommons.org/18939354

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	xternal Links: USPTO, USPTO Assignment, EspacenetMethod of producing a plate-shaped structure, in particular, from silicon, use of said method and plate-shaped structure thus produced, in particular from silicon
http://www.w3.org/ns/prov#wasQuotedFrom	google.com