About: http://webisa.webdatacommons.org/189409901

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 1 is a schematic representation of internal elements and the electrical connections of a sputtering chamber of the kind described above with reference to an ENDURA??? ENCORE??? PVD processing chamber.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com