About: http://webisa.webdatacommons.org/189440522

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 3A is a side view of a wafer carrier and polishing pad arrangement of a CMP machine, wherein a detecting method of pressure distribution is applied according to an embodiment of the present invention;
http://www.w3.org/ns/prov#wasQuotedFrom	google.ca