About: http://webisa.webdatacommons.org/18984082

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	If a barrier such as a sandwich of Ti and TiN is used, the deposition can be performed at elevated
http://www.w3.org/ns/prov#wasQuotedFrom	patents.com