About: http://webisa.webdatacommons.org/190045425

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Generally, an inorganic material such as SiNx or SiOx has been used as the protective film.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com