About: http://webisa.webdatacommons.org/190073280

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Next, resist layers which are wider than the gate electrodes are formed, and these areas are heavily doped with a Group V dopant such as P through the resist layers as masks.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com