About: http://webisa.webdatacommons.org/190080311

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Next, the underlying layer, such as a polysilicon layer, is etched by a second process gas.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com