About: http://webisa.webdatacommons.org/190149384

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Referring now to FIG. 3, showing therein is a flow chart of a thermal activated SACVD method for depositing a very high phosphorous doped silicon oxide film onto a substrate.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com