About: http://webisa.webdatacommons.org/190216086

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A mechanism is provided, such as a spring or vacuum device or pneumatic ram, to exert a shearing force on the substrate while the chip is held on the bottom plate by the protrusions as the temperature is raised.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com