| http://www.w3.org/ns/prov#value | - Moreover, the cylindrical cathode device, according to the invention, should lend itself particularly well for these films because it provides: (a) The choice of depositing in either a high pressure environment (e.g., 10' torr) or a low pressure (e.g., 10- torr), depending on whether the formation of structural defects or the reduction of chemical impurity sites is desired.
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