About: http://webisa.webdatacommons.org/190610173

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	SUMMARY OF THE INVENTION To solve the problems described above, the present invention is a method for enhancing the fidelity of objects to be printed using phase-shifters on a photolithographic mask or reticle.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com