About: http://webisa.webdatacommons.org/190777781

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Consequently, plasma P is created and the processing, such as etching or thin film formation for the workplace 6, is performed.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com