About: http://webisa.webdatacommons.org/190792172

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Conventionally, the following methods (a) and (b) have been known as examples of a method for depositing a polycrystal Si film:
http://www.w3.org/ns/prov#wasQuotedFrom	google.com