PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • However, the wafer bonding technology still has some disadvantages, such as the existence of the etch-stop layer on the surface of the wafer after etching and the uniformity of etching on different sites of the etch-stop layer caused the problem related to the total thickness variation (TTV).
http://www.w3.org/ns/prov#wasQuotedFrom
  • google.com