About: http://webisa.webdatacommons.org/191020915

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Process gases are introduced (block 6109) containing silicon and other species such as hydrogen, nitrogen or oxygen.
http://www.w3.org/ns/prov#wasQuotedFrom	google.de