PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • Although the pedestal may be silicon, if desired, it is preferred that it be of an electrically insulating material such as silicon dioxide, formed at the same time in the fabrication sequence as is the insulation 30 in the device of FIG. 1.
http://www.w3.org/ns/prov#wasQuotedFrom
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