| http://www.w3.org/ns/prov#value | - A layer of a compliant material such as a gel or elastomer, preferably at least about 40 microns thick, more preferably between about 50 and about 100 microns thick and most preferably about 75 microns thick is disposed between the front face 124 of each chip and the first surface 136 of the corresponding dielectric layer.
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