About: http://webisa.webdatacommons.org/191536199

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A conductive layer 30 of suitable interconnect material, such as heavily doped polysilicon or aluminum, is provided over the dielectric layer 28, to a thickness of about 5 ??m.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com