About: http://webisa.webdatacommons.org/192128443

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	For example, a low pressure gas, such as oxygen or nitrogen can be used to accomplish reactive deposition for the deposition of oxides and nitrides respectively.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com