About: http://webisa.webdatacommons.org/192520492

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	However, there is a problem in that a system for performing ellipsometry and a system for optical stress generation and detection are typically separate systems.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com