PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • The Applicant has noticed that the thermocompression bonding between the nozzle plate, typically made of a metallic material such as nickel, and the barrier layer, typically made of a photopolymer material, coated on the silicon material substrate creates mechanical forces, due to the different coefficient of thermal expansion of the materials.
http://www.w3.org/ns/prov#wasQuotedFrom
  • google.com