About: http://webisa.webdatacommons.org/193115264

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Thus, the silicon oxide insulating film may be doped with an element such as phosphorus or boron.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es