About: http://webisa.webdatacommons.org/193130630

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The electronic components 16 in this embodiment are MEMS devices, although, in other embodiments, various other types of components (such as transistors, among others) can be used.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com