PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • The fourth dielectric layer 353 can be applied using CVD, PVD, ALD or other deposition processes.
http://www.w3.org/ns/prov#wasQuotedFrom
  • google.com