PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • The different areas may be characteried by the types of materials, the types of circuitry, or the ability of the polishing process to effectively polish a specific area of a wafer.
http://www.w3.org/ns/prov#wasQuotedFrom
  • google.com