About: http://webisa.webdatacommons.org/193555611

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The scanning probe microscope according to claim 3, wherein the scanning probe microscope is an atomic force microscope and the physical quantity to be detected is an atomic force.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com