About: http://webisa.webdatacommons.org/193672673

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The exemplary system 10 includes a vacuum chamber housing 11, preferably formed of anodized aluminum or other suitable material, having sidewalls 12, a top 13 and a bottom wall 14.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com