About: http://webisa.webdatacommons.org/194413756

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Moreover, the use of both types of reducing agents has been observed to minimize dishing and to produce good uniformity of planarization on the substrate in comparison to conventional barrier material removal compositions.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com