| http://www.w3.org/ns/prov#value | - However, since piezoelectric materials such as PZT and Si have different lattice constants, when a piezoelectric material is deposited on an Si substrate, the piezoelectric material adopts a polycrystalline structure in which a plurality of crystals having different orientations are gathered together in the form of columns as shown in FIG. 7 (FIG. 9 on p. 133 of Non-Patent Document 1).
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