About: http://webisa.webdatacommons.org/194444124

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Note that a mask used for forming the electrodes 508 and 510 may be formed using a material such as silicon oxide or silicon nitride oxide.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com