| http://www.w3.org/ns/prov#value | - P=?????o{(V 2 /d 2)???(V 1 2 /d 1 2)}???(Equation 3) wherein P is the pressure upon the mirror at a particular location, ??o is a constant, V is the voltage applied to an electrode 304 in FIG. 3 in plane 302, d is the distance from the mirror to electrode 304, V1 is the voltage applied to electrode 308 in FIG. 3 within plane 307, and d1 is the distance from the mirror to electrode 308.
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