About: http://webisa.webdatacommons.org/194692450

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Conventional high-dielectric constant insulating materials such as tantalum oxide (Ta2O5), titanium oxide (TiO2) or barium oxide (BaO), for example, are not thermally stable when in direct contact with a silicon substrate.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es